Path: Top -> Journal -> Telkomnika -> 2019 -> Vol 17, No 5, October 2019
A temperature characterization of (Si-FinFET) based on channel oxide thickness
Oleh : Yousif Atalla, Yasir Hashim, Abdul Nasir Abd Ghafar, Waheb A. Jabar, Telkomnika
Dibuat : 2019-07-25, dengan 1 file
Keyword : FinFET, nano-sensor, oxide thickness, temperature
Url : http://journal.uad.ac.id/index.php/TELKOMNIKA/article/view/11798
Sumber pengambilan dokumen : WEB
This paper presents the temperature-gate oxide thickness characteristics of a fin field-effect transistor (FinFET) and discusses the possibility of using such a transistor as a temperature nano-sensor. The investigation of channel oxide thicknessbased temperature characteristics is useful to optimized electrical and temperature characteristics of FinFET. Currentvoltage characteristics with different temperatures and gate oxide thickness values (Tox = 1, 2, 3, 4, and 5 nm) are initially simulated, and the diode mode connection is considered to measure FinFETs temperature sensitivity. Finding the best temperature sensitivity of FinFET is based on the largest change in current (∆I) within a working voltage range of 05 V. According to the results, the temperature sensitivity of FinFET increases linearly with oxide thickness within the range of 15 nm, furthermore, the threshold voltage and drain-induced barrier lowering increase with increasing oxide thickness. Also, the subthreshold swing (SS) is close to the ideal value at the minimum oxide thickness (1 nm) then increases and diverges with increasing oxide thickness. So, the best oxide thickness (nearest SS value to the ideal one) of FinFET under the conditions described in this research is 1 nm.
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